TY  - BOOK
AU  - Stuart,R.V.
TI  - Vacuum technology, thin films, and sputtering: an introduction
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Vacuum technology
KW  - Local
KW  - Cathode sputtering (Plating process)
KW  - Thin films
N1  - Includes index
ER  -