00689nam a2200229Ia 4500 90241 BIBL 20160527204635.0 820720s1983 nyua 00110 eng 82013748 0126747806 EVLG 621.55 S932v Stuart, R. V. 281209 Local Vacuum technology, thin films, and sputtering an introduction R.V. Stuart. New York Academic Press 1983. viii, 151 p. ill. Includes index. Vacuum technology 286847 Local Cathode sputtering (Plating process) 208575 Local Thin films 179300 Local 73490 73490 0 0 0 621_550000000000000_S932V 0 evl 372332 10 10 1 2016-05-27 142437 0 621.55 S932v 80000000709678 2016-05-27 00:00:00 r:90241 z:NCC:D 6