Stuart, R. V. <br/><br/>
Vacuum technology, thin films, and sputtering  an introduction 
R.V. Stuart. 
 - New York  Academic Press  1983. 
 - viii, 151 p.  ill. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>82013748  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology<br/>Cathode sputtering (Plating process)<br/>Thin films