TY  - BOOK
ED  - National Institute of Standards and Technology U.S.
TI  - Programs, activities, and accomplishments
CY  - Gaithersburg,Md.
KW  - National Institute of Standards and Technology U.S
KW  - Local
KW  - Semiconductor industrial equipment industry
KW  - Semiconductors
KW  - Measurement
N1  - Description based on: 2001
ER  -