<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>00603nam a2200169Ia 4500</leader>
  <controlfield tag="001">300706</controlfield>
  <controlfield tag="005">20160527183853.0</controlfield>
  <datafield tag="074" ind1=" " ind2=" ">
    <subfield code="a">0247-D-02(online)</subfield>
  </datafield>
  <datafield tag="086" ind1="0" ind2=" ">
    <subfield code="a">C 13.1/12-2:</subfield>
  </datafield>
  <datafield tag="110" ind1="0" ind2="0">
    <subfield code="a">National Institute of Standards and Technology U.S.</subfield>
    <subfield code="9">141355</subfield>
    <subfield code="2">Local</subfield>
  </datafield>
  <datafield tag="245" ind1="1" ind2="0">
    <subfield code="a">Programs, activities, and accomplishments</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="a">Gaithersburg,Md.</subfield>
  </datafield>
  <datafield tag="500" ind1=" " ind2=" ">
    <subfield code="a">Description based on: 2001.</subfield>
  </datafield>
  <datafield tag="610" ind1="0" ind2="0">
    <subfield code="a">National Institute of Standards and Technology U.S.</subfield>
    <subfield code="9">141355</subfield>
    <subfield code="2">Local</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Semiconductor industrial equipment industry</subfield>
    <subfield code="9">275841</subfield>
    <subfield code="2">Local</subfield>
  </datafield>
  <datafield tag="650" ind1=" " ind2="0">
    <subfield code="a">Semiconductors</subfield>
    <subfield code="x">Measurement</subfield>
    <subfield code="9">167848</subfield>
    <subfield code="2">Local</subfield>
  </datafield>
  <datafield tag="999" ind1=" " ind2=" ">
    <subfield code="c">219567</subfield>
    <subfield code="d">219567</subfield>
  </datafield>
  <datafield tag="952" ind1=" " ind2=" ">
    <subfield code="0">0</subfield>
    <subfield code="1">0</subfield>
    <subfield code="2">sudoc</subfield>
    <subfield code="4">0</subfield>
    <subfield code="6">C_13_100000000000000_122</subfield>
    <subfield code="7">0</subfield>
    <subfield code="8">doc</subfield>
    <subfield code="9">39250</subfield>
    <subfield code="a">10</subfield>
    <subfield code="b">10</subfield>
    <subfield code="c">9</subfield>
    <subfield code="d">2016-05-27</subfield>
    <subfield code="e">Federal Depository</subfield>
    <subfield code="i">456492</subfield>
    <subfield code="l">0</subfield>
    <subfield code="o">C 13.1/12-2</subfield>
    <subfield code="p">800C 13.1/12-2</subfield>
    <subfield code="r">2016-05-27 00:00:00</subfield>
    <subfield code="t">electronic</subfield>
    <subfield code="x">r:300706</subfield>
    <subfield code="y">6</subfield>
  </datafield>
</record>
