Vacuum technology, thin films, and sputtering
Stuart, R. V.
Vacuum technology, thin films, and sputtering an introduction R.V. Stuart. - New York Academic Press 1983. - viii, 151 p. ill.
Includes index.
82013748
Vacuum technology
Cathode sputtering (Plating process)
Thin films
Vacuum technology, thin films, and sputtering an introduction R.V. Stuart. - New York Academic Press 1983. - viii, 151 p. ill.
Includes index.
82013748
Vacuum technology
Cathode sputtering (Plating process)
Thin films